| Cat.No. | Model | Description | Wafer |
|---|---|---|---|
| W01-261-420 | L12-FOUP | Process Carrier (FOUP) | 12 inch |
| Cat.No. | W01-261-420 | |
|---|---|---|
| Model | L12-FOUP | |
| Carrier Type | Front Opening Unified Pod (FOUP) | |
| Wafer Size | 12 inch (300mm) | |
| Wafer Capacity | 25 | |
| Wafer Spacing | 10mm (±0.5mm Positional tolerance wafer to wafer, non-cumulative) | |
| Weight | 4.6 kg (Empty) / about 7.8 kg (Full Loaded) | |
| Size | Included Handler & Robotic Flange | w420×d342×h338 mm |
| Excluded Handler & Robotic Flange | w388×d342×h332 mm | |
* All datum established relative to kinematic coupling per SEMI
* Fist Wafer Position - 44mm nomial relative to horizontal datum plane