• High Vacuum Devices
상세 규격 표
Cat. No. Model Description
M01-680-530 X-LRQ075AL-SV2-KX14P   High vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed
M01-680-535 X-LRQ150AL-SV2-KX14P   High vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-540 X-LRQ300AL-SV2-KX14P   High vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed
M01-680-545 X-LRQ450AL-SV2-KX14P   High vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed
M01-680-550 X-LRQ600AL-SV2-KX14P   High vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed
M01-680-555 X-LSM025A-SV2-KX14P   High vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed
M01-680-560 X-LSM050A-SV2-KX14P   High vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed
M01-680-565 X-LSM100A-SV2-KX14P   High vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed
M01-680-570 X-LSM150A-SV2-KX14P   High vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-575 X-LSM200A-SV2-KX14P  High vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed
M01-680-580 T-NA08A25-SV2-KT03X06P   High vacuum linear actuator, 25 mm travel, RS-232
M01-680-585 T-NA08A50-SV2-KT03X06P   High vacuum linear actuator, 50 mm travel, RS-232
  • High Vacuum Devices Specification
상세 규격 표
Specification
Value Value Value
Model X-LRQ-SV2 Series X-LSM-SV2 Series T-NA-SV2 Series
Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers
Built-in Controller Yes Yes Yes
Repeatability < 2.5 µm <1 ~4 um < 1 µm
Communication Interface RS-232 RS-232 RS-232
Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary
Maximum Centered Load 1000 N 100 N 46 N
Maximum Cantilever Load 3000 N-cm 300 N-cm  
Guide Type Recirculating Ball Linear Guide Needle roller bearing  
Maximum Current Draw 1200 mA 350 mA 350 mA
Power Supply 24-48 VDC 24-48 VDC 12-16 VDC
Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P
Motor Steps Per Rev 200 200 200
Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw
Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor
Manual Control No No No
Axes of Motion 1 1 1
LED Indicators Yes Yes Yes, Bi-colour
Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8" shank, or M3 screws
Vacuum Compatible High vacuum (10-6 Torr) High vacuum (10-6 Torr) High vacuum (10-6 Torr)
Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C
RoHS Compliant Yes Yes Yes
CE Compliant Yes Yes Yes
Tranvel Range 75 ~ 600 mm 25.4 ~ 203.2 mm 25.4 or 50.8 mm
Accuracy 15 ~ 150 um 8 ~ 61 um 15 or 30 um
Maximum Speed 35 ~ 205 mm/s 24 ~ 100 mm/s 8 mm/s
Peak Thrust 60 ~100 N 15 ~35 N 46 N
  • Low Vacuum Devices
상세 규격 표
Cat. No. Model Description
M01-680-600 X-LRQ075AL-SV1-KX14P   Low vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed
M01-680-605 X-LRQ150AL-SV1-KX14P   Low vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-610 X-LRQ300AL-SV1-KX14P   Low vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed
M01-680-615 X-LRQ450AL-SV1-KX14P   Low vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed
M01-680-620 X-LRQ600AL-SV1-KX14P   Low vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed
M01-680-625 X-LSM025A-SV1-KX14P   Low vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed
M01-680-630 X-LSM050A-SV1-KX14P   Low vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed
M01-680-635 X-LSM100A-SV1-KX14P   Low vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed
M01-680-640 X-LSM150A-SV1-KX14P   Low vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-645 X-LSM200A-SV1-KX14P  Low vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed
M01-680-650 T-NA08A25-SV1-KT03X06P   Low vacuum linear actuator, 25 mm travel, RS-232
M01-680-655 T-NA08A50-SV1-KT03X06P Low vacuum linear actuator, 50 mm travel, RS-232
  •  Low Vacuum Devices Specification
상세 규격 표
Specification
Value Value Value
Model X-LRQ-SV1 Series X-LSM-SV1 Series T-NA-SV1 Series
Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers
Built-in Controller Yes Yes Yes
Repeatability < 2.5 µm <1 ~4 um < 1 µm
Communication Interface RS-232 RS-232 RS-232
Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary
Maximum Centered Load 1000 N 100 N 46 N
Maximum Cantilever Load 3000 N-cm 300 N-cm  
Guide Type Recirculating Ball Linear Guide Needle roller bearing  
Maximum Current Draw 1200 mA 350 mA 350 mA
Power Supply 24-48 VDC 24-48 VDC 12-16 VDC
Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P
Motor Steps Per Rev 200 200 200
Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw
Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor
Manual Control No No No
Axes of Motion 1 1 1
LED Indicators Yes Yes Yes, Bi-colour
Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8" shank, or M3 screws
Vacuum Compatible High vacuum (10-3 Torr) High vacuum (10-3 Torr) High vacuum (10-3 Torr)
Operating Temperature Range 0 to 50 degrees C 0 to 50 degrees C 0 to 50 degrees C
RoHS Compliant Yes Yes Yes
CE Compliant Yes Yes Yes
Tranvel Range 75 ~ 600 mm 25.4 ~ 203.2 mm 25.4 or 50.8 mm
Accuracy 15 ~ 150 um 8 ~ 61 um 15 or 30 um
Maximum Speed 35 ~ 205 mm/s 24 ~ 100 mm/s 8 mm/s
Peak Thrust 60 ~100 N 15 ~35 N 46 N